"In-line Filters Alicat offers in-line sintered filters for use with our mass flow meters and mass flow controllers to prevent large particulates from entering the measurement head of the instrument. Maximum particulate sizes are as follows:

• Max particulate size of 5 microns for units with full-scale flow ranges of 0-1 sccm or less.
• Max particulate size of 20 microns for units with full-scale flow ranges between 0-2 sccm and 0-1 slpm.
• Max particulate size of 50 microns for units with full-scale flow ranges of 0-1 slpm or more.